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PUBLIKASI ILMIAH

The High Capacitance for Electrode Structure of Interdigital Capacitor Thin Film Models

Risse Entikaria Rachmanita1, Sarawoot Boonkirdram2, Somporn Thawankaew3, Watchara Chao-Moo3, Athorn Vora-Ud3, Melania Suweni Muntini4, Tosawat Seetawan3,*

1Renewable Energy Engineering, Politeknik Negeri Jember, Jember, 68121, Indonesia

2Program of Electrical and Electronic, Faculty of Industrial Technology, Sakon Nakhon Rajabhat University, 680 Nittayo Road, Mueang District, Sakon Nakhon 47000, Thailand

3Center of Excellence on Alternative Energy, Research and Development Institute and Program of Physics, Faculty of Science and Technology, Sakon Nakhon Rajabhat University, 680 Nittayo Road, Mueang District, Sakon Nakhon 47000, Thailand

4Department of Physics, Institut Teknologi Sepuluh Nopember, Surabaya, 60111, Indonesia

*Corresponding Author: t_seetawan@snru.ac.th

Abstract

This paper presents the outcomes of a study to determine the capacitance and electrical properties of interdigital capacitors (IDCs) thin film in 3 models. Three models of IDCs thin film were designed and fabricated on standard FR-4 PCB board using dc magnetron sputtering. The three IDCs thin film models have the same electrode material, the number of electrodes, the length, and the width of electrode but differ in electrode structure. The electrode material is silver (Ag). The capacitance, resistance, impedance, and conductance of IDCs thin films were measured and analyzed by LCR-6100 at room temperature. The electrode structure has a significant effect on the electrical properties of IDCs thin films. The new models of IDCs thin film, model 2 and model 3, show high capacitance in the range frequency of 1 – 100 kHz compare with general IDCs.

Keywords: Electrode thin film, DC magnetron sputtering, Electrical properties, Interdigital capacitor

https://www.tci-thaijo.org/index.php/snru_journal/article/view/171622

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